Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection

Y. G. Jiang, T. Ono, M. Esashi

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

This paper presents the design, fabrication and characterization method of piezoresistive nanocantilevers for ultra-sensitive force detection application. A shallow boron-doped layer as thin as 40 nm is achieved using spin-on diffusion. The piezoresistive nanocantilevers are patterned by electron beam (EB) lithography and fast atom beam (FAB) etching. The resonance response of the nanocantilevers is characterized by both optical readout using a laser Doppler vibrometer and piezoresistive self-detection. A soft spring effect is detected in the nanocantilevers.

Original languageEnglish
Article number084011
JournalMeasurement Science and Technology
Volume19
Issue number8
DOIs
Publication statusPublished - 2008 Aug 1

Keywords

  • NEMS
  • Nanocantilever
  • Piezoresistive cantilever
  • Spin-on diffusion

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

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