Fabrication of OTFT array with coated thin film dielectric and printed electrodes by using microcontact printing

Jeongdai Jo, Taik Min Lee, Chung Hwan Kim, Kwang Young Kim, Eung Sug Lee, Masayoshi Esashi

Research output: Contribution to journalConference articlepeer-review

Abstract

The gate, source, and drain electrodes of organic thin-film transistor(OTFT) to use as a switching device for a flexible display was fabricated in microcontact printing process with hard poly(dimethylsiloxane)(h- PDMS) stamp. The OTFT with thin-film dielectric layer of parylene-C(4300Å, 5000Å, 6500Å, 7500Å, and 9000A&̊) were formed using special coating system, and organic semiconductor layer was ink-jet printing process at room temperature. The microcontact printing process using self-assembled monolayer(SAM) and h-PDMS stamp made it possible to fabricate OTFT with channel length down to 600nm, fabricated thin film electrode of Au/Cr (100nm/5nm), and reduced the fabrication process by 20steps compared with photolithography process. Since the fabrication process was done in room temperature, there was no appeared such as pattern shrinkage, pattern transformation and bending problem.

Original languageEnglish
Pages (from-to)661-664
Number of pages4
JournalAdvanced Materials Research
Volume24-25
DOIs
Publication statusPublished - 2007 Jan 1
EventPRICM 6: The 6th Pacific Rim International Conference on Advanced Materials and Processing - Jeju Island, Korea, Republic of
Duration: 2007 Nov 52007 Nov 9

Keywords

  • Flexible display
  • Microcontact printing
  • OTFT
  • PDMS stamp
  • Printed electronics
  • SAM

ASJC Scopus subject areas

  • Engineering(all)

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