Fabrication of OTFT array on plastic substrate by using nanocontact printing and low temperature process

Jeongdai Jo, Eung Sug Lee, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The flexible organic thin film transistor (OTFT) array to use as a switching device for an organic light emitting diode (OLED) was designed and fabricated in the microcontact printing and low-temperature processes. The gate, source, and drain electrode patterns of OTFT were fabricated by nanocontact printing which is high-resolution lithography technology using polydimethylsiloxane(PDMS) stamp. The OTFT array with dielectric layer and organic active semiconductor layers formed at room temperature or at a temperature lower than 4Ot. The nanocontact printing process using SAM and PDMS stamp made it possible to fabricate OTFT arrays with channel lengths down to even nano size, and reduced the procedure by 10 steps compared with photolithography. Since the process was done in low temperature, there was no pattern transformation and bending problem appeared. Also, it was possible to increase close packing of molecules by SAM, to improve electric field mobility, to decrease contact resistance, and to reduce threshold voltage by using a big dielectric and fabricate nanopatterns.

Original languageEnglish
Title of host publication2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Pages588-591
Number of pages4
Publication statusPublished - 2006 Dec 1
Event2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006 - Cincinnati, OH, United States
Duration: 2006 Jun 172006 Jun 20

Publication series

Name2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Volume2

Other

Other2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006
Country/TerritoryUnited States
CityCincinnati, OH
Period06/6/1706/6/20

Keywords

  • Flexible display
  • Nanocontact printing(nCP)
  • OTFT array
  • Organic semiconductor
  • PDMS stamp
  • SAM

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)

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