Fabrication of ordered submicrometer-scale convex lens array via nanoimprint lithography using an anodized aluminum mold

Kai Kawahara, Tatsuya Kikuchi, Shungo Natsui, Ryosuke O. Suzuki

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

The fabrication of submicrometer-scale ordered convex lens array was demonstrated through nanoimprint lithography using an aluminum dimple array mold fabricated by etidronic acid anodizing and selective oxide dissolution. Highly-pure aluminum plates were anodized in a 0.2 M etidronic acid solution at 260 V for the formation of ordered porous alumina. The anodized specimens were immersed in a 0.2 M CrO3/0.51 M H3PO4 solution to dissolve the porous alumina, and an ordered dimple array measuring approximately 670 nm in dimple diameter was obtained on the aluminum surface. Phosphonic acid-based self-assembled monolayers (SAMs) were coated on the aluminum dimple array as a release agent for nanoimprint lithography. The shape of the aluminum dimple array mold was transferred to a UV curable photopolymer by nanoimprint lithography. An ordered convex lens array, which corresponded to the negative shape of the dimple array, was successfully obtained by the removal of curable polymer. However, the polymer surface was contaminated with phosphonate molecules due to the multilayered phosphonate films being formed on the aluminum mold. This contamination can be avoided by ultrasonication of the aluminum mold before nanoimprint lithography.

Original languageEnglish
Pages (from-to)61-68
Number of pages8
JournalMicroelectronic Engineering
Volume185-186
DOIs
Publication statusPublished - 2018 Jan 5
Externally publishedYes

Keywords

  • Aluminum mold
  • Anodizing
  • Convex lens array
  • Nanoimprint lithography
  • Self-assembled monolayers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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