Using an ordered nanopore array of anodic porous alumina membrane obtained by a two-step anodization process, ordered array of tungsten nanoparticles was fabricated using an electron-beam-induced selective deposition process. The nanoparticles were preferentially formed in the pores in the electron-beam irradiated area. The microstructure and composition of as-deposited nanoparticles were characterized. The as-deposited nanoparticles contain many nanocrystallites. The nanocrystallites were identified to be the equilibrium phase of bcc structure metal W at room temperature.
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2004 Nov 1|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering