Fabrication of ordered array of tungsten nanopartlcles on anodic porous alumina by electron-beam-induced selective deposition

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya

    Research output: Contribution to journalArticlepeer-review

    8 Citations (Scopus)

    Abstract

    Using an ordered nanopore array of anodic porous alumina membrane obtained by a two-step anodization process, ordered array of tungsten nanoparticles was fabricated using an electron-beam-induced selective deposition process. The nanoparticles were preferentially formed in the pores in the electron-beam irradiated area. The microstructure and composition of as-deposited nanoparticles were characterized. The as-deposited nanoparticles contain many nanocrystallites. The nanocrystallites were identified to be the equilibrium phase of bcc structure metal W at room temperature.

    Original languageEnglish
    Pages (from-to)2589-2593
    Number of pages5
    JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
    Volume22
    Issue number6
    DOIs
    Publication statusPublished - 2004 Nov 1

    ASJC Scopus subject areas

    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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