Fabrication of nanowires using high-energy ion beams

Satoshi Tsukuda, Shu Seki, Seiichi Tagawa, Masaki Sugimoto, Akira Idesaki, Shigeru Tanaka, Akihiro Oshima

Research output: Contribution to journalLetterpeer-review

56 Citations (Scopus)


Nanowire formation in Si-based polymer thin films using a heavy ion beam is discussed in terms of energy density deposition along ion tracks. Gelation of the polymer along the ion track results in cross-linking to produce nanowires with size and number density controllable by selecting appropriate ion beam characteristics and polymer materials. Ion bombardment of poly(carbosilane) (PCS), PCS-poly(vinylsilane) blend polymer, and poly(methylphenylsilane) produces nanowires with radii of 7-30 nm depending on the type of ion beam. The difference in size is shown to be related to the efficiency of the cross-linking reaction considering the deposited energy distribution along the ion tracks.

Original languageEnglish
Pages (from-to)3407-3409
Number of pages3
JournalJournal of Physical Chemistry B
Issue number11
Publication statusPublished - 2004 Mar 18
Externally publishedYes

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Materials Chemistry


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