Fabrication of multiple slit using stacked-sliced method for hard X-ray Talbot-Lau interferometer

Keshu Wan, Yoshihiro Takeda, Wataru Yashiro, Atsushi Momose

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


We propose using a multiple slit fabricated by a simple and economical stacked-sliced method for X-ray phase imaging with a Talbot-Lau X-ray interferometer. Foils of Ta and Al were stacked alternately, and the stack was sliced up perpendicular to the stacking direction. We successfully fabricated a hard X-ray multiple slit with a space size (Al foil thickness) of about 10μm and an aspect ratio of 60. Optical microscopy evaluation showed its regular pitch pattern at its surface. A high-resolution X-ray transmission image proved the regularity of the inner part. The visibility of moiré fringes and the phase-contrast image obtained using the Talbot-Lau interferometer with the multiple slit proved the feasibility of the stacked-sliced approach.

Original languageEnglish
Pages (from-to)7412-7414
Number of pages3
JournalJapanese journal of applied physics
Issue number9 PART 1
Publication statusPublished - 2008 Sep 12
Externally publishedYes


  • Grating
  • Multiple silt
  • Phase contrast
  • Talbot-Lau interferometry
  • X-ray

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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