Fabrication of multiple al micro-materials by electromigration using a comb pattern and a conductive passivation film

Yasuhiro Kimura, Masumi Saka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Electromigration (EM) is the phenomenon of atomic diffusion in a metallic film with a high-density electron flow. Our group used EM to fabricate Al micro-materials. The EM technique can be used to fabricate micro-materials with a high aspect ratio, pure metal components, an arbitrary form, and a single-crystal structure. Recently, two micro-materials have been simultaneously fabricated using an array pattern consisting of parallel or series connections. However, multiple micro-materials have not been fabricated simultaneously thus far. In this study, a new comb sample pattern was used with a conductive passivation film to produce multiple Al micro-materials.

Original languageEnglish
Title of host publicationManufacturing and Applied Research
PublisherTrans Tech Publications
Pages36-40
Number of pages5
ISBN (Print)9783038350590
DOIs
Publication statusPublished - 2014 Jan 1
Event2nd International Conference on Manufacturing, Manufacturing 2014 - , Singapore
Duration: 2014 Feb 92014 Feb 10

Publication series

NameAdvanced Materials Research
Volume909
ISSN (Print)1022-6680

Other

Other2nd International Conference on Manufacturing, Manufacturing 2014
CountrySingapore
Period14/2/914/2/10

Keywords

  • Al micro-materials
  • Atomic diffusion
  • Comb pattern
  • Conductive passivation
  • Electromigration

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Kimura, Y., & Saka, M. (2014). Fabrication of multiple al micro-materials by electromigration using a comb pattern and a conductive passivation film. In Manufacturing and Applied Research (pp. 36-40). (Advanced Materials Research; Vol. 909). Trans Tech Publications. https://doi.org/10.4028/www.scientific.net/AMR.909.36