Fabrication of Multi-Axis Moving Coil Type Electromagnetic Micro-Actuator Using Parylene Beams for Pure In-Plane Motion

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we report a moving coil type electromagnetic micro-actuator, which can achieve multi-axis in-plane motion. Magnetic transduction is the most attractive to various applications, including micromanipulator, gyroscopes, and micro-scanners. There are two types of electromagnetic actuator, a moving magnet type and a moving coil type. Moving coil type is suitable for achieving in-plane displacement by controlling the magnetic field. However, the moving magnet type has the disadvantage of cross-coupled out-of-plane displacement which needs an additional mechanical constrain structure to overcome if pure in-plane actuation is required. In this work, the moving coil type actuator was fabricated, which was formed by four driving units, one center moving stage, and soft parylene beams. Each of the driving units was formed by four driving springs, which were made of silicon and metal and connected by a shuttle. The center moving stage was connected with the four shuttles. In-plane Lorentz force was generated to deform the driving springs by applying current and magnetic field. In the experiment, the relationship between the current and displacement was revealed under different strength of magnetic field. The maximum displacement was 20 by applying 262 mA current under a 0.273 T magnetic field.

Original languageEnglish
Title of host publication21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages667-670
Number of pages4
ISBN (Electronic)9781665412674
DOIs
Publication statusPublished - 2021 Jun 20
Event21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 - Virtual, Online, United States
Duration: 2021 Jun 202021 Jun 25

Publication series

Name21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference

Conference21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Country/TerritoryUnited States
CityVirtual, Online
Period21/6/2021/6/25

Keywords

  • electromagnetic actuator
  • in-plane motion
  • moving coil
  • multi-axis actuation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Control and Optimization
  • Instrumentation

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