Fabrication of miniature Clark oxygen sensor integrated with microstructure

Ching Chou Wu, Tomoyuki Yasukawa, Hitoshi Shiku, Tomokazu Matsue

Research output: Contribution to journalArticle

75 Citations (Scopus)

Abstract

A miniature Clark-type oxygen sensor has been integrated with a microstructure using a novel fabrication technique. The oxygen chip consists of a glass substrate with a three-electrode configuration, which is separated and connected by a groove, and a poly(dimethylsiloxane) (PDMS) container with an immobilized PDMS oxygen-permeable membrane. The assembly of the different substrates only uses the O2 plasma bonding technique, and the fabrication temperatures do not exceed 95 °C. Characteristics of the miniature sensor include the fastest response time of 6.8 s, good linearity with a correlation coefficient of 0.995, and a long lifetime of at least 60 h. The present miniature Clark oxygen sensor can be readily integrated with a microfluidic system to form a μ-TAS.

Original languageEnglish
Pages (from-to)342-349
Number of pages8
JournalSensors and Actuators, B: Chemical
Volume110
Issue number2
DOIs
Publication statusPublished - 2005 Oct 14

Keywords

  • Clark oxygen sensor
  • Miniaturization
  • O plasma bonding
  • Poly(dimethylsiloxane)
  • μ-TAS

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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