Fabrication of micropump with spiral-type magnetic micro-machine

A. Yamazaki, M. Sendoh, K. Ishiyama, K. I. Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we propose a micropump using a magnetic micro-machine. Magnetic micro-machines require no power supply cables, no controlling systems on the machine body. So this micropump works without wire and is suitable for the miniaturization. We fabricated the micropump and examined its properties.

Original languageEnglish
Title of host publicationIntermag 2003 - Program of the 2003 IEEE International Magnetics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780376471, 9780780376472
DOIs
Publication statusPublished - 2003 Jan 1
Event2003 IEEE International Magnetics Conference, Intermag 2003 - Boston, United States
Duration: 2003 Mar 302003 Apr 3

Publication series

NameIntermag 2003 - Program of the 2003 IEEE International Magnetics Conference

Other

Other2003 IEEE International Magnetics Conference, Intermag 2003
CountryUnited States
CityBoston
Period03/3/3003/4/3

Keywords

  • Fabrication
  • Frequency
  • Magnetic fields
  • Micromagnetics
  • Micropumps
  • Petroleum
  • Silicon
  • Spirals
  • Viscosity
  • Wire

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Yamazaki, A., Sendoh, M., Ishiyama, K., & Arai, K. I. (2003). Fabrication of micropump with spiral-type magnetic micro-machine. In Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference [1230363] (Intermag 2003 - Program of the 2003 IEEE International Magnetics Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/INTMAG.2003.1230363