Fabrication of micro-tips by lift off process with contact shadow masking

Honam Kwon, Akio Higo, Hiroshi Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    We present a simple fabrication method of a micro tip on an electrothermal cantilever actuator, utilizing a lift-off process with a contact shadow mask. Nickel was deposited and patterned to be used as contact shadow mask on the photoresist tip spacer, followed by forming of through-holes for aluminum tips. The radius of the fabricated aluminum tip was found to be 40 nm or less at the apex. The sharp tip was formed on a layered metal cantilever of gold and chromium for electro-thermal actuation. Cantilever was found to deliver a displacement of 0.5 um with electrical current of 90 mA.

    Original languageEnglish
    Title of host publicationProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
    Pages488-492
    Number of pages5
    DOIs
    Publication statusPublished - 2007
    Event2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand
    Duration: 2007 Jan 162007 Jan 19

    Publication series

    NameProceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

    Other

    Other2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
    CountryThailand
    CityBangkok
    Period07/1/1607/1/19

    Keywords

    • Contact shadow mask
    • Data storage
    • Evaporation
    • Lift off
    • Tip

    ASJC Scopus subject areas

    • Computer Networks and Communications
    • Computer Science Applications
    • Electrical and Electronic Engineering

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