Fabrication of metal-based nanoporous structures

Yu Ching Lin, Pei Chun Chen, Lu Yang Chen, Ming Wei Chen, Masayoshi Esashi, Thomas Gessner

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

This study has introduced two simple micro/nano technology compatible nanostructure fabrications. Nanochannel-structured porous alumina can be performed with anodic oxidation and chemical etching. The nanochannel and pore size are determined by adjusting experimental parameters as well as anodizing voltage. The gold thin film with randomly nanoporous holes is fabricated with binary alloy deposition subsequently a dealloying process in which one metal is selectively dissolved. The porous size can be controlled with various dealloying time and temperature. These encouraging dimension-controllable easy-fabricated nanofabrications imply some possibilities for developing further micro/nano integratable application.

Original languageEnglish
Publication statusPublished - 2010 Jan 1
EventSystems Integration 2010 - 4th European Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components - Como, Italy
Duration: 2010 Mar 232010 Mar 24

Other

OtherSystems Integration 2010 - 4th European Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components
CountryItaly
CityComo
Period10/3/2310/3/24

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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