Fabrication of MEMS-driven wire grid polarizers in THz region and evaluation of the optical characteristics

Yuta Ishii, Yosuke Nakata, Yu Tokizane, Yuma Takida, Yoshiaki Kanamori, Hiroaki Minamide, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


Micro-electromechanical-systems driven wire grid polarizers (MEMS-WGPs) were proposed and fabricated. MEMS-WGPs mainly consisted of an Au cantilever array and two kinds of electrical leads. One lead was connected with cantilevers and the other lead was located under the cantilevers. Because the cantilevers were electrostatically actuated downward by applying voltage between the two leads and made contact with the next cantilever, transmittance could be changed. Static wire grid polarizers were also fabricated and measured their optical characteristics in THz region, as preliminary step toward MEMS-WGPs. MEMS-WGP was successfully fabricated and the cantilever array was electrostatically actuated. In THz region, transmittance of the fabricated MEMS-WGP was changed from 14.7% to 10.6% on average by applied voltage of 200V.

Original languageEnglish
Pages (from-to)407-414
Number of pages8
JournalIEEJ Transactions on Sensors and Micromachines
Issue number11
Publication statusPublished - 2017


  • MEMS
  • Plasmon
  • Terahertz
  • Wire-grid polarizers

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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