For obtaining low residual stress, AIN thin films were prepared on Si substrates with diverse bottom electrode materials of Pt/Ti, Au/Cr, Al, and Ti by the electron cyclotron resonance (ECR) deposition technology. Among them, AIN thin films deposited on the substrate with the AI bottom electrode demonstrated not only low residual stress but also high enough c-axis orientation, and thus they were utilized to fabricate microgenerators by the micromachining process for converting environmental vibration energy into electric energy. The AIN microgenerator had a resonant frequency of 1042.6 Hz and the output power was 1.42 μW at the vibration frequency and 1g acceleration.
ASJC Scopus subject areas
- Physics and Astronomy(all)