Fabrication of low-loss zinc-selenide coated silver hollow waveguides for CO2 laser light

Yuji Matsuura, Mitsunobu Miyagi, Akihito Hongo

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9 Citations (Scopus)

Abstract

ZnSe coated Ag hollow waveguides transmitting CO2 laser light were developed. An inner ZnSe coating of good quality was obtained with high rf power and high translating speed in deposition by rf sputtering. The inner ZnSe layer was found to be amorphous by x-ray diffraction analysis; A layer structure (ZnSe-Ag) was observed by Auger electron spectroscopy analysis. Transmission properties of the short waveguides with 25 cm length were evaluated by measurements of loss spectra in the mid-IR region. As a result, ZnSe coated Ag waveguides showed lower loss than the Ge coated one fabricated previously, and the loss for CO2 laser light was predicted to be 0.021 dB/m. Furthermore, it was found that a ZnSe coated Ag waveguide is durable in practical use.

Original languageEnglish
Pages (from-to)5463-5466
Number of pages4
JournalJournal of Applied Physics
Volume68
Issue number11
DOIs
Publication statusPublished - 1990 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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