Fabrication of lead zirconate titanate microrods for 1-3 piezocomposites using hot isostatic pressing with silicon molds

Shinan Wang, Jing Feng Li, Ryuzo Watanabe, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

47 Citations (Scopus)

Abstract

A new lost-mold process to fabricate piezoceramic microrods for 1-3 piezocomposites has been developed. A Si wafer was machined as a mold with a regular array of columnar cavities having a negative structure of piezoceramic microrods, by deep reactive ion etching (RIE). A lead zirconate titanate (PZT) slurry was cast into the Si mold and calcinated to burn out the binder, and fully condensed in the cavities by the glass-encapsulated hot isostatic pressing technique. Finally, the Si mold was selectively removed by XeF 2 etching. PZT microrods with high aspect ratios (diameter <12 μm, aspect ratio >14), which can be used to construct high-resolution micro-ultrasonic transducers for medical imaging, were fabricated successfully by the present process.

Original languageEnglish
Pages (from-to)213-215
Number of pages3
JournalJournal of the American Ceramic Society
Volume82
Issue number1
Publication statusPublished - 1999 Dec 1

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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