Abstract
Solid state combinatorial synthesis of oxide thin films is an attractive proposition due to the large number of compositions that could have potentially useful properties. Thin film growth, however, presents a unique set of problems related to the formation of heterointerfaces. Although this problem affects mostly the study of heterostructures, even simple film growth has to handle the substrate-film interface. We have developed a technique for growing lattice constant tunable Ba 1-x Sr x TiO 3 (BSTO)/BaTiO 3 (BTO) buffer layers on SrTiO 3 (STO) substrates in order to study the effects of lattice strain in a systematic way in combinatorial thin film libraries. We show that by combining low temperature deposition and high temperature annealing, it is possible to grow buffers with an in-plane lattice constant gradient in the range of 3.9-4.02 Å using a composition spread Ba 1-x Sr x TiO 3 layer.
Original language | English |
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Pages (from-to) | 183-187 |
Number of pages | 5 |
Journal | Applied Surface Science |
Volume | 223 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 2004 Feb 15 |
Externally published | Yes |
Keywords
- Buffer layer
- Composition spread
- Strain
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films