Fabrication of lattice-tunable Ba 1-x Sr x TiO 3 buffers on a SrTiO 3 substrate

Kota Terai, Mikk Lippmaa, Parhat Ahmet, Toyohiro Chikyow, Hideomi Koinuma, Makoto Ohtani, Masashi Kawasaki

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Solid state combinatorial synthesis of oxide thin films is an attractive proposition due to the large number of compositions that could have potentially useful properties. Thin film growth, however, presents a unique set of problems related to the formation of heterointerfaces. Although this problem affects mostly the study of heterostructures, even simple film growth has to handle the substrate-film interface. We have developed a technique for growing lattice constant tunable Ba 1-x Sr x TiO 3 (BSTO)/BaTiO 3 (BTO) buffer layers on SrTiO 3 (STO) substrates in order to study the effects of lattice strain in a systematic way in combinatorial thin film libraries. We show that by combining low temperature deposition and high temperature annealing, it is possible to grow buffers with an in-plane lattice constant gradient in the range of 3.9-4.02 Å using a composition spread Ba 1-x Sr x TiO 3 layer.

Original languageEnglish
Pages (from-to)183-187
Number of pages5
JournalApplied Surface Science
Issue number1-3
Publication statusPublished - 2004 Feb 15
Externally publishedYes


  • Buffer layer
  • Composition spread
  • Strain

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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