Fabrication of lateral lattice-polarity-inverted GaN heterostructure

Ryuji Katayama, Yoshihiro Kuge, Takashi Kondo, Kentaro Onabe

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

Fabrication of the lateral polarity-inverted GaN heterostructure on sapphire (0 0 0 1) using a radio-frequency plasma enhanced molecular beam epitaxy is demonstrated. Its microscopic properties, which are closely related to the local polarity distribution, such as surface potentials, piezoelectric polarizations and residual carrier concentrations were investigated by Kelvin force microscopy and micro-Raman scattering. The successful inversion from Ga-polarity to N-polarity of GaN in a specific domain and its higher crystal perfection had been confirmed clearly by these microscopic analyses. The results were also fairly consistent with that of KOH etching experiments, which suggest the applicability of these processes to the fabrication of photonic nanostructures composed of nitride semiconductors.

Original languageEnglish
Pages (from-to)447-451
Number of pages5
JournalJournal of Crystal Growth
Volume301-302
Issue numberSPEC. ISS.
DOIs
Publication statusPublished - 2007 Apr 1

Keywords

  • A1. Kelvin force microscopy
  • A1. Lattice polarity
  • A1. Raman scattering
  • A3. RF-MBE
  • B1. Nitrides

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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