TY - JOUR
T1 - Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method
AU - Van, Jiwang
AU - Syoji, Katsuo
AU - Kuriyagawa, Tsunemoto
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2002/4
Y1 - 2002/4
N2 - The conventional method for aspheric surface diamond turning is the arc-enveloping method. In the present study, a new method termed the straight-line enveloping method is proposed, in which the aspheric surface is generated using a straight-nosed diamond tool on a three-axis simultaneous control ultraprecision machine tool. This method is preferable to the conventional method for the machining of convex aspheric surfaces on hard brittle materials since it significantly improves efficiency and lowers tool wear. The experimental setup configuration and the tool setting method are described and the formation of form error is analyzed. An aspheric lens having 1.36μm form error and 78nmRy surface roughness was obtained on a 120mm diameter single-crystal silicon substrate at a tool feed rate of 20μm/rev. by applying the proposed method.
AB - The conventional method for aspheric surface diamond turning is the arc-enveloping method. In the present study, a new method termed the straight-line enveloping method is proposed, in which the aspheric surface is generated using a straight-nosed diamond tool on a three-axis simultaneous control ultraprecision machine tool. This method is preferable to the conventional method for the machining of convex aspheric surfaces on hard brittle materials since it significantly improves efficiency and lowers tool wear. The experimental setup configuration and the tool setting method are described and the formation of form error is analyzed. An aspheric lens having 1.36μm form error and 78nmRy surface roughness was obtained on a 120mm diameter single-crystal silicon substrate at a tool feed rate of 20μm/rev. by applying the proposed method.
KW - Aspheric surface
KW - Diamond turning
KW - Ductile regime machining
KW - Lens
KW - Optical component
KW - Single crystal silicon
KW - Ultra-precision machining
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U2 - 10.2493/jjspe.68.561
DO - 10.2493/jjspe.68.561
M3 - Article
AN - SCOPUS:31344439835
VL - 68
SP - 561
EP - 565
JO - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
JF - Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
SN - 0912-0289
IS - 4
ER -