Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method

Translated title of the contribution: Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method

Jiwang Van, Katsuo Syoji, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

The conventional method for aspheric surface diamond turning is the arc-enveloping method. In the present study, a new method termed the straight-line enveloping method is proposed, in which the aspheric surface is generated using a straight-nosed diamond tool on a three-axis simultaneous control ultraprecision machine tool. This method is preferable to the conventional method for the machining of convex aspheric surfaces on hard brittle materials since it significantly improves efficiency and lowers tool wear. The experimental setup configuration and the tool setting method are described and the formation of form error is analyzed. An aspheric lens having 1.36μm form error and 78nmRy surface roughness was obtained on a 120mm diameter single-crystal silicon substrate at a tool feed rate of 20μm/rev. by applying the proposed method.

Translated title of the contributionFabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method
Original languageJapanese
Pages (from-to)561-565
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume68
Issue number4
DOIs
Publication statusPublished - 2002 Apr

ASJC Scopus subject areas

  • Mechanical Engineering

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