Abstract
Fabrication of L10-FePt thin films by using conventional thermal annealing and indirect rapid thermal annealing is studied. By using conventional thermal annealing, L10-FePt thin films are fabricated over 500°C. By using the rapid thermal annealing, it was found that the formation temperature of L10-FePt thin films decreases effectively. In addition, this method enables to prevent the grain growth due to annealing.
Original language | English |
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Pages (from-to) | 3898-3900 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 41 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2005 Oct |
Externally published | Yes |
Keywords
- Average grain diameter
- Film surface morphology
- L1-FePt alloy
- Rapid thermal annealing
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering