Fabrication of L10-FePt thin films by rapid thermal annealing

K. Aimuta; K. Nishimura; S. Hashi; M. Inoue

doi:10.1109/TMAG.2005.854941

Fabrication of L1₀-FePt thin films by rapid thermal annealing

K. Aimuta, K. Nishimura, S. Hashi, M. Inoue

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Fabrication of L1₀-FePt thin films by using conventional thermal annealing and indirect rapid thermal annealing is studied. By using conventional thermal annealing, L1₀-FePt thin films are fabricated over 500°C. By using the rapid thermal annealing, it was found that the formation temperature of L1₀-FePt thin films decreases effectively. In addition, this method enables to prevent the grain growth due to annealing.

Original language	English
Pages (from-to)	3898-3900
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	41
Issue number	10
DOIs	https://doi.org/10.1109/TMAG.2005.854941
Publication status	Published - 2005 Oct 1
Externally published	Yes

Keywords

Average grain diameter
Film surface morphology
L1-FePt alloy
Rapid thermal annealing

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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AU - Nishimura, K.

AU - Hashi, S.

AU - Inoue, M.

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N2 - Fabrication of L10-FePt thin films by using conventional thermal annealing and indirect rapid thermal annealing is studied. By using conventional thermal annealing, L10-FePt thin films are fabricated over 500°C. By using the rapid thermal annealing, it was found that the formation temperature of L10-FePt thin films decreases effectively. In addition, this method enables to prevent the grain growth due to annealing.

AB - Fabrication of L10-FePt thin films by using conventional thermal annealing and indirect rapid thermal annealing is studied. By using conventional thermal annealing, L10-FePt thin films are fabricated over 500°C. By using the rapid thermal annealing, it was found that the formation temperature of L10-FePt thin films decreases effectively. In addition, this method enables to prevent the grain growth due to annealing.

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KW - Film surface morphology

KW - L1-FePt alloy

KW - Rapid thermal annealing

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