Fabrication of isolated FePd nanoparticles by sputtering and heat treatment

Tetsu Ichitsubo; Masayuki Koujina; Masao Kawashima; Masahiko Hirao

doi:10.1143/jjap.42.2858

Fabrication of isolated FePd nanoparticles by sputtering and heat treatment

Tetsu Ichitsubo, Masayuki Koujina, Masao Kawashima, Masahiko Hirao

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

In this paper, we describe the fabrication of two-dimensionally dispersed nanoparticles by sputtering and annealing. FePd has been chosen as the target material. As the first step of this process, ultrathin films were sputter-deposited on Si substrates. Subsequently, they were annealed at 450-800°C. As the result, numerous nanoparticles with a diameter of about 5 nm were formed on the substrate surface, when the thickness of the as-deposited film was approximately less than 3 nm.

Original language	English
Pages (from-to)	2858-2859
Number of pages	2
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	42
Issue number	5 A
DOIs	https://doi.org/10.1143/jjap.42.2858
Publication status	Published - 2003 May
Externally published	Yes

Keywords

FePd
Isolated nanoparticle
Magnetic recording media
Nanometer size
Sputtering method

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.42.2858

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@article{b9305c88db3847eb997449c3f8c0d359,

title = "Fabrication of isolated FePd nanoparticles by sputtering and heat treatment",

abstract = "In this paper, we describe the fabrication of two-dimensionally dispersed nanoparticles by sputtering and annealing. FePd has been chosen as the target material. As the first step of this process, ultrathin films were sputter-deposited on Si substrates. Subsequently, they were annealed at 450-800°C. As the result, numerous nanoparticles with a diameter of about 5 nm were formed on the substrate surface, when the thickness of the as-deposited film was approximately less than 3 nm.",

keywords = "FePd, Isolated nanoparticle, Magnetic recording media, Nanometer size, Sputtering method",

author = "Tetsu Ichitsubo and Masayuki Koujina and Masao Kawashima and Masahiko Hirao",

year = "2003",

month = may,

doi = "10.1143/jjap.42.2858",

language = "English",

volume = "42",

pages = "2858--2859",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "5 A",

}

TY - JOUR

T1 - Fabrication of isolated FePd nanoparticles by sputtering and heat treatment

AU - Ichitsubo, Tetsu

AU - Koujina, Masayuki

AU - Kawashima, Masao

AU - Hirao, Masahiko

PY - 2003/5

Y1 - 2003/5

N2 - In this paper, we describe the fabrication of two-dimensionally dispersed nanoparticles by sputtering and annealing. FePd has been chosen as the target material. As the first step of this process, ultrathin films were sputter-deposited on Si substrates. Subsequently, they were annealed at 450-800°C. As the result, numerous nanoparticles with a diameter of about 5 nm were formed on the substrate surface, when the thickness of the as-deposited film was approximately less than 3 nm.

AB - In this paper, we describe the fabrication of two-dimensionally dispersed nanoparticles by sputtering and annealing. FePd has been chosen as the target material. As the first step of this process, ultrathin films were sputter-deposited on Si substrates. Subsequently, they were annealed at 450-800°C. As the result, numerous nanoparticles with a diameter of about 5 nm were formed on the substrate surface, when the thickness of the as-deposited film was approximately less than 3 nm.

KW - FePd

KW - Isolated nanoparticle

KW - Magnetic recording media

KW - Nanometer size

KW - Sputtering method

UR - http://www.scopus.com/inward/record.url?scp=0037697356&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037697356&partnerID=8YFLogxK

U2 - 10.1143/jjap.42.2858

DO - 10.1143/jjap.42.2858

M3 - Article

AN - SCOPUS:0037697356

VL - 42

SP - 2858

EP - 2859

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 5 A

ER -

Fabrication of isolated FePd nanoparticles by sputtering and heat treatment

Abstract

Keywords

ASJC Scopus subject areas

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