Abstract
In this paper, we describe the fabrication of two-dimensionally dispersed nanoparticles by sputtering and annealing. FePd has been chosen as the target material. As the first step of this process, ultrathin films were sputter-deposited on Si substrates. Subsequently, they were annealed at 450-800°C. As the result, numerous nanoparticles with a diameter of about 5 nm were formed on the substrate surface, when the thickness of the as-deposited film was approximately less than 3 nm.
Original language | English |
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Pages (from-to) | 2858-2859 |
Number of pages | 2 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 42 |
Issue number | 5 A |
Publication status | Published - 2003 May 1 |
Externally published | Yes |
Keywords
- FePd
- Isolated nanoparticle
- Magnetic recording media
- Nanometer size
- Sputtering method
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)