Fabrication of IoT force sensor module in five-day program for students as part of nanotechnology platform Japan project

Kentaro Totsu, Masaaki Moriyama, Hiraku Watanabe, Toshiyuki Kikuta, Masahiro Hemmi, Masaaki Shoji, Takashi Yoshida, Masataka Tatsuta

Research output: Contribution to journalArticlepeer-review

Abstract

An IoT force sensor module was fabricated and demonstrated in a five-day practical program for students, as part of the Nanotechnology Platform Japan project. The module mainly consists of a silicon-based piezoresistive micro-electromechanical system (MEMS) force sensor and a microcontroller with a WiFi wireless communication function. The MEMS force sensor was fabricated on a 4-inch silicon wafer in four days by each student. The IoT force sensor module was connected to an IoT cloud server via the internet and was successfully monitored by a smartphone. All of the fabrication, implementation, and testing processes were carried out by students at Hands-On-Access Fabrication Facility, Tohoku University.

Original languageEnglish
Pages (from-to)2555-2563
Number of pages9
JournalSensors and Materials
Volume31
Issue number8
DOIs
Publication statusPublished - 2019

Keywords

  • IoT
  • MEMS
  • Piezoresistive sensor
  • WiFi
  • Wireless

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)

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