Abstract
Inverse opal waveguide structure has been fabricated on patterned polysilane waveguide structure. Embedded inverse opal into patterned polysilane waveguide structure was made up by self assembly of polystyrene template, infiltrated TiO2 dielectric material and finally calcinated at 400 °C. The proposed fabrication method has successfully created inverse opal TiO2 on the patterned polysilane waveguide structure.
| Original language | English |
|---|---|
| Pages (from-to) | 1208-1210 |
| Number of pages | 3 |
| Journal | Japanese journal of applied physics |
| Volume | 47 |
| Issue number | 2 PART 2 |
| DOIs | |
| Publication status | Published - 2008 Feb 15 |
Keywords
- Inverse opal
- Polysilane
- Waveguide
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)
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Safriani, L., Cai, B., Komatsu, K., Sugihara, O., & Kaino, T. (2008). Fabrication of inverse opal TiO2 waveguide structure. Japanese journal of applied physics, 47(2 PART 2), 1208-1210. https://doi.org/10.1143/JJAP.47.1208