Fabrication of inverse opal TiO2 waveguide structure

Lusi Safriani, Bin Cai, Kyoji Komatsu, Okihiro Sugihara, Toshikuni Kaino

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Inverse opal waveguide structure has been fabricated on patterned polysilane waveguide structure. Embedded inverse opal into patterned polysilane waveguide structure was made up by self assembly of polystyrene template, infiltrated TiO2 dielectric material and finally calcinated at 400 °C. The proposed fabrication method has successfully created inverse opal TiO2 on the patterned polysilane waveguide structure.

Original languageEnglish
Pages (from-to)1208-1210
Number of pages3
JournalJapanese journal of applied physics
Volume47
Issue number2 PART 2
DOIs
Publication statusPublished - 2008 Feb 15

Keywords

  • Inverse opal
  • Polysilane
  • Waveguide

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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    Safriani, L., Cai, B., Komatsu, K., Sugihara, O., & Kaino, T. (2008). Fabrication of inverse opal TiO2 waveguide structure. Japanese journal of applied physics, 47(2 PART 2), 1208-1210. https://doi.org/10.1143/JJAP.47.1208