Fabrication of inverse opal TiO2 waveguide structure

Lusi Safriani; Bin Cai; Kyoji Komatsu; Okihiro Sugihara; Toshikuni Kaino

doi:10.1143/JJAP.47.1208

Fabrication of inverse opal TiO₂ waveguide structure

Lusi Safriani, Bin Cai, Kyoji Komatsu, Okihiro Sugihara, Toshikuni Kaino

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Inverse opal waveguide structure has been fabricated on patterned polysilane waveguide structure. Embedded inverse opal into patterned polysilane waveguide structure was made up by self assembly of polystyrene template, infiltrated TiO₂ dielectric material and finally calcinated at 400 °C. The proposed fabrication method has successfully created inverse opal TiO₂ on the patterned polysilane waveguide structure.

Original language	English
Pages (from-to)	1208-1210
Number of pages	3
Journal	Japanese journal of applied physics
Volume	47
Issue number	2 PART 2
DOIs	https://doi.org/10.1143/JJAP.47.1208
Publication status	Published - 2008 Feb 15

Keywords

Inverse opal
Polysilane
Waveguide

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.47.1208

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AU - Cai, Bin

AU - Komatsu, Kyoji

AU - Sugihara, Okihiro

AU - Kaino, Toshikuni

PY - 2008/2/15

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N2 - Inverse opal waveguide structure has been fabricated on patterned polysilane waveguide structure. Embedded inverse opal into patterned polysilane waveguide structure was made up by self assembly of polystyrene template, infiltrated TiO2 dielectric material and finally calcinated at 400 °C. The proposed fabrication method has successfully created inverse opal TiO2 on the patterned polysilane waveguide structure.

AB - Inverse opal waveguide structure has been fabricated on patterned polysilane waveguide structure. Embedded inverse opal into patterned polysilane waveguide structure was made up by self assembly of polystyrene template, infiltrated TiO2 dielectric material and finally calcinated at 400 °C. The proposed fabrication method has successfully created inverse opal TiO2 on the patterned polysilane waveguide structure.

KW - Inverse opal

KW - Polysilane

KW - Waveguide

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