Fabrication of hollow fibers for CO2 laser by using MOCVD method

Yuji Matsuura, Daisuke Miura, Mitsunobu Miyagi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


Hollow fibers for transmitting high-power CO2 laser light are fabricated by metal organic chemical vapor deposition (MOCVD) method. A dielectric film of metal oxides, such as Y2O3, ZrO2, and Cu2O is deposited inside a Ag-coated glass capillary by using metal acetylacetonate as a precursor. The waveguide coated by Cu2O with the bore diameter of 700 μm showed the lowest attenuation of 0.8 dB/m for CO2 laser light. The metal oxide films deposited by MOCVD have high chemical and heat resistivity. Therefore the hollow fiber coated with these materials is suitable for high power laser applications under a severe environment.

Original languageEnglish
Pages (from-to)119-124
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1998 Dec 1
EventProceedings of Surgical-Assist Systems - San Jose, CA, United States
Duration: 1998 Jan 251998 Jan 28


  • Hollow waveguides
  • Infrared lasers
  • Power delivery

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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