Fabrication of highly L10-ordered FePt thin films by low-temperature rapid thermal annealing

M. Mizuguchi, T. Sakurada, T. Y. Tashiro, K. Sato, T. J. Konno, K. Takanashi

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


Highly L10-ordered FePt thin films with a strong (001) texture were successfully fabricated on amorphous substrates simply by co-sputtering and rapid thermal annealing at a low temperature of 400â°C. The morphology of FePt thin films depended strongly on the heating rate, changing from a continuous structure with an atomically flat surface to an island-like structure. The change of the morphology resulted in a drastic increase of coercivity, indicating that the magnetization process could be controlled by the heating condition. This fabrication method of ordered FePt thin films is favorable in view of the compatibility for a practical device fabrication process.

Original languageEnglish
Article number032117
JournalAPL Materials
Issue number3
Publication statusPublished - 2013 Sep

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)

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