Fabrication of high-resolution nanopattern by using nanocontact printing with flexible h-PDMS stamp

The PDMS stamp used in nanocontact printing can be categorized into a s-PDMS stamp and h-PDMS stamp, according to a pattern size and fabrication methods. The fabrication process of the h-PDMS stamp for the high fidelity pattern form of a nano-size was similar to that of the s-PDMS stamp, and it was fabricated by using VDT-731, SIP 6831.1, Fluka 87927, and HMS-301 as mold materials. The h-PDMS stamp has a replicated pattern exactly corresponding to the master pattern and has a high accuracy of filling and releasing. The surface property and the thermo-chemical changing characteristic of the h-PDMS stamp as fabricated were measured and analyzed in the nanocontact printing experiment process. With an optic microscope, the followings were ascertained; fluid characteristics, such as a phenomenon that the h-PDMS stamp was reduced in the size, shrinking and paring phenomenon, a pattern form, a size and a filling defect. Also, in the surface property, as a result of measuring the wettability, it could be known that the h-PDMS stamp has the surface characteristic of the hydrophobic and surface energy of 110°. The adhesion force and the friction force of 12nN were very low.