Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass

Xinghua Li, Takashi Abe, Yongxun Liu, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

119 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass'. Together they form a unique fingerprint.

Engineering

Physics

Medicine and Dentistry

Chemistry

Material Science