Fabrication of high-accuracy microtranslation table for near-field optical data storage actuated by inverted scratch-drive actuators

Yoshiaki Kanamori, Hiroto Yahagi, Takahito Ono, Minoru Sasaki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

We proposed a microtranslation table to convey a recording medium to a near-field optical head. The microtranslation table was fabricated on a silicon substrate with surface micromachining technology and consisted of inverted scratch-drive actuators (SDAs) actuated by electrostatic force. An object was translated by mounting it on the inverted SDA array. We observed that a micro object was translated in the direction of the fabricated SDAs by applying AC voltage of ±600 V at 100 Hz. The dimension of the SDA plate was 70 μm long, 70 μm wide, and 1.3 μm thick and it has 1.5-μm-high bushing. We proposed a novel mechanism for releasing the SDAs from the object by retracting them. By applying the voltage of 65 V between the SDA plate and the lower electrode, the plate was retracted 160nm down. Therefore, the X-Y translation is possible by placing the inverted SDAs in four different directions.

Original languageEnglish
Pages (from-to)4074-4078
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number6 B
Publication statusPublished - 2003 Jun 1

Keywords

  • Data storage
  • Micromachining
  • Microtranslation table
  • Near-field
  • Scratch-drive actuators

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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