Fabrication of high accuracy micro-translation-table for near-field optical data storage actuated by inverted-scratch-drive-actuators

Y. Kanamori, H. Yahagi, T. Ono, M. Sasaki, K. Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


In recent years, development of a next generation high-density recording system has attracted an increasing attention with the improvement of the storage density. One of the attractive technologies to overcome the limit of the storage density is near-field optical data storage. The optical memory with high density and high data transfer rate is highly demanded to utilize an array of nano-scaled light sources for writing and reading bits formed on a recording medium. We have fabricated a micro-translation-table to convey the recording medium to the near-field optical head. The proposed micro-translation-table consists of the inverted scratch drive-actuators (SDAs) which are electrostatically driven. The inverted SDA is powerful and precise due to the stepwise movement. A long distance translation is achieved by repeating the stepwise movement. Fast moving speed, high response and the positioning resolution of the order of 1 nanometer are possible. The inverted SDA has been fabricated with silicon surface micromachining technology. We have proposed a novel mechanism that the SDAs can be retracted to a substrate by applying the voltage between the SDA and a lower electrode. Therefore, the SDAs used for the conveyance are stretched and others are retracted. We have observed that a micro object is translated with the fabricated actuators by applying AC voltage of 600 V at 100 Hz.

Original languageEnglish
Title of host publication2002 International Microprocesses and Nanotechnology Conference, MNC 2002
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages2
ISBN (Electronic)4891140313, 9784891140311
Publication statusPublished - 2002 Jan 1
EventInternational Microprocesses and Nanotechnology Conference, MNC 2002 - Tokyo, Japan
Duration: 2002 Nov 62002 Nov 8


OtherInternational Microprocesses and Nanotechnology Conference, MNC 2002

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering


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