Fabrication of gratings for an x-ray talbot interferometer

M. Tanaka, Y. Takeda, D. Noda, W. Yashiro, K. Okuda, A. Momose, T. Hattori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

X-ray based imaging measurement has found applications in fields such as medical diagnosis and nondestructive inspection, having become one of essential technologies. However, its low sensitivity to biologically soft tissues limits scope of applications. several methods have been developed for X-ray phase imaging, We proposed a method using an X-ray Talbot interferometer. It offers advantages; it is a very simple setup using two gratings; it has a potential of phase imaging with a compact laboratory X-ray source. but the fabrication of an amplitude X-ray grating is a difficult. because the structure of grating must have high aspect ratio. We used deep X-ray lithography and electroforming of Au in fabricating gratings. The period and height of the grating were 5.3μm and 31μm. We evaluated the gratings, successfully achieved a high visibility of 71%. With the gratings that had a period of 8 μm and a height of 29 μm, we conducted X ray phase tomography of rabbit liver and a mouse tail. As a result, we successfully observed soft tissues and high-density tissues. The gratings, therefore, had sufficient performance to conduct phase tomography.

Original languageEnglish
Title of host publication2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS
DOIs
Publication statusPublished - 2006 Dec 1
Externally publishedYes
Event2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS - Nagoya, Japan
Duration: 2006 Nov 52006 Nov 8

Publication series

Name2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS

Other

Other2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS
CountryJapan
CityNagoya
Period06/11/506/11/8

ASJC Scopus subject areas

  • Computational Mechanics
  • Control and Systems Engineering
  • Human Factors and Ergonomics

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