TY - GEN
T1 - Fabrication of gratings for an x-ray talbot interferometer
AU - Tanaka, M.
AU - Takeda, Y.
AU - Noda, D.
AU - Yashiro, W.
AU - Okuda, K.
AU - Momose, A.
AU - Hattori, T.
PY - 2006/12/1
Y1 - 2006/12/1
N2 - X-ray based imaging measurement has found applications in fields such as medical diagnosis and nondestructive inspection, having become one of essential technologies. However, its low sensitivity to biologically soft tissues limits scope of applications. several methods have been developed for X-ray phase imaging, We proposed a method using an X-ray Talbot interferometer. It offers advantages; it is a very simple setup using two gratings; it has a potential of phase imaging with a compact laboratory X-ray source. but the fabrication of an amplitude X-ray grating is a difficult. because the structure of grating must have high aspect ratio. We used deep X-ray lithography and electroforming of Au in fabricating gratings. The period and height of the grating were 5.3μm and 31μm. We evaluated the gratings, successfully achieved a high visibility of 71%. With the gratings that had a period of 8 μm and a height of 29 μm, we conducted X ray phase tomography of rabbit liver and a mouse tail. As a result, we successfully observed soft tissues and high-density tissues. The gratings, therefore, had sufficient performance to conduct phase tomography.
AB - X-ray based imaging measurement has found applications in fields such as medical diagnosis and nondestructive inspection, having become one of essential technologies. However, its low sensitivity to biologically soft tissues limits scope of applications. several methods have been developed for X-ray phase imaging, We proposed a method using an X-ray Talbot interferometer. It offers advantages; it is a very simple setup using two gratings; it has a potential of phase imaging with a compact laboratory X-ray source. but the fabrication of an amplitude X-ray grating is a difficult. because the structure of grating must have high aspect ratio. We used deep X-ray lithography and electroforming of Au in fabricating gratings. The period and height of the grating were 5.3μm and 31μm. We evaluated the gratings, successfully achieved a high visibility of 71%. With the gratings that had a period of 8 μm and a height of 29 μm, we conducted X ray phase tomography of rabbit liver and a mouse tail. As a result, we successfully observed soft tissues and high-density tissues. The gratings, therefore, had sufficient performance to conduct phase tomography.
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U2 - 10.1109/MHS.2006.320247
DO - 10.1109/MHS.2006.320247
M3 - Conference contribution
AN - SCOPUS:50449085081
SN - 1424407176
SN - 9781424407170
T3 - 2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS
BT - 2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS
T2 - 2006 IEEE International Symposium on Micro-Nano Mechanical and Human Science, MHS
Y2 - 5 November 2006 through 8 November 2006
ER -