Fabrication of floating-gate-type fin-channel double-and tri-gate flash memories and comparative study of their electrical characteristics

Yongxun Liu, Takahiro Kamei, Takashi Matsukawa, Kazuhiko Endo, Shinichi O'Uchi, Junichi Tsukada, Hiromi Yamauchi, Yuki Ishikawa, Tetsuro Hayashida, Kunihiro Sakamoto, Atsushi Ogura, Meishoku Masahara

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication of floating-gate-type fin-channel double-and tri-gate flash memories and comparative study of their electrical characteristics'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science