Fabrication of Distributed Electrostatic Micro Actuator (DEMA)>/ti>

K. Minami, S. Kawamura, M. Esashi

Research output: Contribution to journalArticlepeer-review

28 Citations (Scopus)

Abstract

A distributed electrostatic micro actuator (DEMA) has been proposed. The actuator has many small driving units which consist of two wave-like insulated electrodes. Both ends of insulated electrodes are connected to each other, and the driving unit has narrow gap for deformation caused by electrostatic forces. The driving units have large area of electrodes and are distributed in series and in parallel. So, a strong electrostatic force can be obtained, and the deformation and the generated force of the actuator would be large. Macro model of the DEMA was fabricated with polyimide films, and the deformation of the actuator was measured. When the applied voltage was 200 V, the deformation ratio was 36%. A micro actuator was fabricated by use of photolithography and electroplating. The displacement of 28 um was observed when applied voltage was 160 V. Experimental results of the micro actuator were compared with the results simulated by finite element method (FEM) analysis.

Original languageEnglish
Pages (from-to)121-127
Number of pages7
JournalJournal of Microelectromechanical Systems
Volume2
Issue number3
DOIs
Publication statusPublished - 1993 Sep

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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