Abstract
To investigate the cutting characteristics of tantalum, three types of cutting tools were prepared. From the cutting experiments, it is found that the tool with the rake angle of 28° is the most suitable for precision machining of tantalum.
Original language | English |
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Pages (from-to) | 1367-1369 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics |
Volume | 27 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2009 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry