Fabrication of cutting tools for ultraprecision machining of tantalum and their cutting characteristics

M. Mizutani, T. Naruse, Y. Kameyama, Y. Koma, H. Ohmori, C. Sasaki

Research output: Contribution to journalArticlepeer-review

Abstract

To investigate the cutting characteristics of tantalum, three types of cutting tools were prepared. From the cutting experiments, it is found that the tool with the rake angle of 28° is the most suitable for precision machining of tantalum.

Original languageEnglish
Pages (from-to)1367-1369
Number of pages3
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume27
Issue number3
DOIs
Publication statusPublished - 2009
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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