Fabrication of copper-nanoparticle embedded in amorphous carbon films and their electrical conductive properties

Takanori Takeno, Takeshi Ohno, Hiroyuki Miki, Toshiyuki Takagi

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Electrical conductive properties of copper-carbon composite coatings were investigated. Films of several hundred nanometers were deposited onto dielectric substrates using acetylene-generated plasma and co-sputtering of copper target. Transmission electron microscope was employed for the analyses of the microstructure of the coatings. Temperature dependence of resistance of the investigated coatings was measured by changing the temperature from 80–400 K in vacuum condition. Electrical conductive properties were discussed in terms of the microstructure of the coatings deposited under the various conditions.

Original languageEnglish
Pages (from-to)935-940
Number of pages6
JournalInternational Journal of Applied Electromagnetics and Mechanics
Volume33
Issue number3-4
DOIs
Publication statusPublished - 2010

Keywords

  • amorphous carbon
  • copper
  • electrical conductive properties
  • nano-particle

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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