Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis

Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Mamoru Omori, Toshiyuki Hashida, Rüdiger Berger, Takahito Ono

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)

Abstract

A fabrication method of carbon nanotube (CNT)-carbon composite microstructures has been developed. CNT-carbon composite microstructures with dimensions from 10 micrometers to several hundred micrometers have been fabricated by pyrolysis process from the patterned SU-8 photoresist mixed with 1 wt% of CNTs at temperature of ~600 C under inert atmosphere. The resulting composite microstructures with a high aspect ratio of ~34 can be successfully fabricated by this novel fabrication method. This research provides a simple approach that is compatible with microfabrication technology and is capable of fabricating composite microstructures with reproducible shape and dimensions, at desired locations. This approach has potential for the further exploring of applications of composite micro/nano structures as functional units in various microdevices. Also the ultramicroindentation hardness of the CNT-carbon composite films was investigated by nanoindentation measurement.

Original languageEnglish
Pages (from-to)201-208
Number of pages8
JournalMicrosystem Technologies
Volume20
Issue number2
DOIs
Publication statusPublished - 2014 Feb

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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