TY - JOUR
T1 - Fabrication of anti-corrosive capacitive vacuum sensors with a silicon carbide/polysilicon bi-layer diaphragm and electrical through-hole connections on the opposite side
AU - Larangot, Benoît
AU - Tanaka, Shuji
AU - Esashi, Masayoshi
PY - 2008
Y1 - 2008
N2 - This paper reports a capacitive vacuum sensor with a bi-layer diaphragm made of silicon carbide (SiC) and polysilicon for uses in corrosive environments like etchers. The diaphragm side is completely covered with SiC to avoid corrosion, and electrical contacts are placed on the opposite side for easy packaging. This vacuum sensor design was realized with ]a sealing of the pressure reference room achieved by Au-Si eutectic bonding. In spite of incomplete sealing of the pressure reference room, the fabricated vacuum sensor was evaluated using a laser Doppler meter and an impedance analyzer.
AB - This paper reports a capacitive vacuum sensor with a bi-layer diaphragm made of silicon carbide (SiC) and polysilicon for uses in corrosive environments like etchers. The diaphragm side is completely covered with SiC to avoid corrosion, and electrical contacts are placed on the opposite side for easy packaging. This vacuum sensor design was realized with ]a sealing of the pressure reference room achieved by Au-Si eutectic bonding. In spite of incomplete sealing of the pressure reference room, the fabricated vacuum sensor was evaluated using a laser Doppler meter and an impedance analyzer.
KW - Capacitive vacuum sensor
KW - Harsh environment
KW - Non-evaporable getter (NEG)
KW - Silicon carbide
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U2 - 10.1541/ieejsmas.128.331
DO - 10.1541/ieejsmas.128.331
M3 - Article
AN - SCOPUS:73849106078
VL - 128
SP - 331
EP - 336
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 8
ER -