Fabrication of al micro-coil and loop by utilizing electromigration

Yuxin Sun, Masumi Saka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Aluminum micro-coil and micro-loop have been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form micro-fibers owing to crystallization. The fibers are rotated under the existence of the transverse force induced by the tilted holes during their growth, and the micro-coil and micro-loop are fabricated.

Original languageEnglish
Title of host publication2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
Pages589-592
Number of pages4
DOIs
Publication statusPublished - 2008 Dec 1
Event2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008 - Kowloon, Hong Kong
Duration: 2008 Jun 32008 Jun 5

Publication series

Name2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008

Other

Other2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
Country/TerritoryHong Kong
CityKowloon
Period08/6/308/6/5

ASJC Scopus subject areas

  • Biotechnology
  • Electrical and Electronic Engineering

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