Fabrication of al micro-coil and loop by utilizing electromigration

Yuxin Sun, Masumi Saka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Aluminum micro-coil and micro-loop have been fabricated by utilizing electromigration. In a passivated Al line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form micro-fibers owing to crystallization. The fibers are rotated under the existence of the transverse force induced by the tilted holes during their growth, and the micro-coil and micro-loop are fabricated.

Original languageEnglish
Title of host publication2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
Pages589-592
Number of pages4
DOIs
Publication statusPublished - 2008 Dec 1
Event2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008 - Kowloon, Hong Kong
Duration: 2008 Jun 32008 Jun 5

Publication series

Name2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008

Other

Other2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
CountryHong Kong
CityKowloon
Period08/6/308/6/5

ASJC Scopus subject areas

  • Biotechnology
  • Electrical and Electronic Engineering

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