Fabrication of Al micro-belts by utilizing electromigration

Yebo Lu, Masumi Saka

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

The fabrication of electromigration induced micro-belts in passivated aluminum films was investigated. The experimental sample was a passivated polycrystalline Al line with a slit and a rectangular hole at the anode end. The micro-belts could be formed at predetermined positions, with their length dependent on the current stress time, and their widths and thicknesses controlled by the size of the hole. It was found that the growth of the micro-belt is affected by the purity of Al, the current density and the current stress time. The experimental results are explained in the discussion.

Original languageEnglish
Pages (from-to)2227-2229
Number of pages3
JournalMaterials Letters
Volume63
Issue number26
DOIs
Publication statusPublished - 2009 Oct 31

Keywords

  • Aluminum
  • Current stress
  • Electromigration
  • Micro-belts

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

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