Abstract
Aluminum microspheres with diameters of 4-7 μm have been fabricated by utilizing electromigration. In a passivated AI line with a slit at the anode end, atoms accumulated before the slit due to high current density and high substrate temperature are released from the pre-introduced holes in the passivation layer, and form microspheres with aid of surface tension. The spheres are formed at the specific ranqe of the temperature at the anode end of AI line.
| Original language | English |
|---|---|
| Pages (from-to) | 1972-1975 |
| Number of pages | 4 |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 9 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2009 Mar 1 |
Keywords
- Aluminum
- Electromigration
- Microsphere
- Passivation layer
- Surface tension
ASJC Scopus subject areas
- Condensed Matter Physics
- Chemistry(all)
- Materials Science(all)
- Bioengineering
- Biomedical Engineering
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Cite this
Sun, Y., Tohmyoh, H., & Saka, M. (2009). Fabrication of AI microspheres by utilizing electromigration. Journal of Nanoscience and Nanotechnology, 9(3), 1972-1975. https://doi.org/10.1166/jnn.2009.444