Fabrication of actuators using magnetostrictive thin films

T. Honda, K. I. Arai, M. Yamaguchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Citations (Scopus)


A new concept of the microactuation driven by magnetostriction is proposed. We fabricated two kinds of cantilever actuators and a traveling machine, composed of the magnetostrictive thin films on a polyimide film. Amorphous Tb-Fe and Sm-Fe thin films were used as the magnetostrictive materials. These actuators moved without power supply cable and the cantilever actuators exhibited the large deflection in low magnetic fields. Such unique characteristics suggest that the magnetostriction is suitable for the driving force of the microactuator.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994 Jan 1
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: 1994 Jan 251994 Jan 28


OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Fabrication of actuators using magnetostrictive thin films'. Together they form a unique fingerprint.

Cite this