Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer

Kazuki Mano, Ryo Aihara, Yuki Shimizu, Yuanliu Chen, I Ko

Research output: Contribution to conferencePaper

Abstract

This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diameter collimated beam, is integrated into the optical setup. In this paper, an evaluation of the intensity distribution of the collimated beam and an exposure experiment are carried out. In addition, the fabricated grating is measured by an atomic force microscope to evaluate the effectiveness of the developed setup with the large collimating lens.

Original languageEnglish
Publication statusPublished - 2017 Nov 13
Event9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan
Duration: 2017 Nov 132017 Nov 17

Other

Other9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
CountryJapan
CityHiroshima City
Period17/11/1317/11/17

Keywords

  • Advanced manufacturing technology
  • Diffraction grating
  • Laser interference lithography
  • Lloyd's mirror interferometer

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Mano, K., Aihara, R., Shimizu, Y., Chen, Y., & Ko, I. (2017). Fabrication of a two-dimensional diffraction grating by a two-axis Lloyd's mirror interferometer. Paper presented at 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017, Hiroshima City, Japan.