Fabrication of a Si-PZT hybrid XY-microstage with CNT-carbon hinges

Liang He, Masaya Toda, Yusuke Kawai, Mohd Faizul Sarbi, Mamoru Omori, Toshiyuki Hashida, Takahito Ono

Research output: Contribution to journalReview article

4 Citations (Scopus)

Abstract

A Si-PZT (PbZrTiO3) hybrid XY-microstage with "carbon nanotube (CNT)-carbon composite" hinges is designed and fabricated. The CNT-carbon composite is partially used for the flexible hinge parts in the Si-PZT hybrid XY-microstage. The CNT-carbon composite has a low elastic constant and no mechanical hysteresis. The CNT-carbon hinge parts are formed by the process including micromolding and pyrolysis. Then, two stacked PZT actuators are assembled into the XY-microstage.

Original languageEnglish
Pages (from-to)425-426
Number of pages2
JournalIEEJ Transactions on Sensors and Micromachines
Volume132
Issue number11
DOIs
Publication statusPublished - 2012

Keywords

  • Carbon nanotube
  • Microfabrication
  • Microstage
  • PZT actuators

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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