A Si-PZT (PbZrTiO3) hybrid XY-microstage with "carbon nanotube (CNT)-carbon composite" hinges is designed and fabricated. The CNT-carbon composite is partially used for the flexible hinge parts in the Si-PZT hybrid XY-microstage. The CNT-carbon composite has a low elastic constant and no mechanical hysteresis. The CNT-carbon hinge parts are formed by the process including micromolding and pyrolysis. Then, two stacked PZT actuators are assembled into the XY-microstage.
- Carbon nanotube
- PZT actuators
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering