Fabrication of a monolithic capacitive pressure sensor for gauge pressure measurement

Masayoshi Esashi; Daiji Uehara

doi:10.1002/ecjb.4420760710

Fabrication of a monolithic capacitive pressure sensor for gauge pressure measurement

Masayoshi Esashi, Daiji Uehara

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

Abstract

A pressure sensor integrated with a capacitive relative pressure detector and capacitance‐detection circuit was fabricated and its characteristics were evaluated. The humidity resistance of the pressure sensor was discussed, and it was confirmed that the influence of humidity to the device could be minimized.

Original language	English
Pages (from-to)	85-91
Number of pages	7
Journal	Electronics and Communications in Japan (Part II: Electronics)
Volume	76
Issue number	7
DOIs	https://doi.org/10.1002/ecjb.4420760710
Publication status	Published - 1993

Keywords

Capacitive sensor
humidity resistance
monolithic sensor
relative pressure sensor

ASJC Scopus subject areas

Physics and Astronomy(all)
Computer Networks and Communications
Electrical and Electronic Engineering

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10.1002/ecjb.4420760710

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title = "Fabrication of a monolithic capacitive pressure sensor for gauge pressure measurement",

abstract = "A pressure sensor integrated with a capacitive relative pressure detector and capacitance‐detection circuit was fabricated and its characteristics were evaluated. The humidity resistance of the pressure sensor was discussed, and it was confirmed that the influence of humidity to the device could be minimized.",

keywords = "Capacitive sensor, humidity resistance, monolithic sensor, relative pressure sensor",

author = "Masayoshi Esashi and Daiji Uehara",

year = "1993",

doi = "10.1002/ecjb.4420760710",

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AU - Esashi, Masayoshi

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KW - humidity resistance

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KW - relative pressure sensor

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Fabrication of a monolithic capacitive pressure sensor for gauge pressure measurement

Abstract

Keywords

ASJC Scopus subject areas

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