Fabrication of a monolithic capacitive pressure sensor for gauge pressure measurement

Masayoshi Esashi, Daiji Uehara

Research output: Contribution to journalArticlepeer-review

Abstract

A pressure sensor integrated with a capacitive relative pressure detector and capacitance‐detection circuit was fabricated and its characteristics were evaluated. The humidity resistance of the pressure sensor was discussed, and it was confirmed that the influence of humidity to the device could be minimized.

Original languageEnglish
Pages (from-to)85-91
Number of pages7
JournalElectronics and Communications in Japan (Part II: Electronics)
Volume76
Issue number7
DOIs
Publication statusPublished - 1993

Keywords

  • Capacitive sensor
  • humidity resistance
  • monolithic sensor
  • relative pressure sensor

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering

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