Fabrication of a high-precision spherical micromirror by bending a silicon plate with a metal pad

Tong Wu, Kazuhiro Hane

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We demonstrate here the fabrication of a smooth mirror surface by bending a thin silicon plate. A spherical surface is achieved by the bending moment generated in the circumference of the micromirror. Both convex and concave spherical micromirrors are realized through the anodic bonding of silicon and Pyrex glass. Since the mirror surface is originated from the polished silicon surface and no additional etching is introduced for manufacturing, the surface roughness is thus limited to the polishing error. This novel approach opens possibilities for fabricating a smooth surface for micromirror and microlens applications.

Original languageEnglish
Pages (from-to)5321-5328
Number of pages8
JournalApplied optics
Volume50
Issue number27
DOIs
Publication statusPublished - 2011 Sep 20

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Fabrication of a high-precision spherical micromirror by bending a silicon plate with a metal pad'. Together they form a unique fingerprint.

  • Cite this