Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire

K. Uehara, C. M. Yang, T. Shibata, S. K. Kim, Suguru Kameda, H. Nakase, K. Tsubouchi

Research output: Contribution to journalConference articlepeer-review

32 Citations (Scopus)


5-GHz-band surface acoustic wave (SAW) filters for mobile communication were fabricated on atomically-flat-surface (0001)aluminum nitride/(0001)sapphire (AlN/Al2O3) combination. The SAW devices were fabricated using electron beam lithography and lift-off method. Atomically-flat-surface AlN films were used to reduce SAW propagation loss. Center frequency of the fabricated SAW filter was 5.18 GHz. SAW velocity was 5688 m/s at normalized thickness by wave number (kH) of 9.9. Effective coupling coefficient was 0.1 % and temperature-coefficient of delay was 9ppm/°C at kH of 5.9. SAW propagation loss was 0.0053 dB at 5.18 GHz. The atomically-flat-surface (0001)AlN/(0001)Al2O3 combination is promised to be used for 5-GHz-band SAW filter for the application to mobile communication.

Original languageEnglish
Pages (from-to)203-206
Number of pages4
JournalProceedings - IEEE Ultrasonics Symposium
Publication statusPublished - 2004
Event2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
Duration: 2004 Aug 232004 Aug 27

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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