Fabrication method of quartz glass ring resonator using sacrificial support structure

Muhammad Jehanzeb Khan, Takashiro Tsukamoto, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.

Original languageEnglish
Article number115018
JournalJournal of Micromechanics and Microengineering
Volume30
Issue number11
DOIs
Publication statusPublished - 2020 Nov

Keywords

  • MEMS gyroscope
  • quartz glass resonator
  • ring resonator
  • sacrificial supporting structure

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Fabrication method of quartz glass ring resonator using sacrificial support structure'. Together they form a unique fingerprint.

Cite this