Fabrication method of quartz glass ring resonator using sacrificial support structure

Muhammad Jehanzeb Khan; Takashiro Tsukamoto; Shuji Tanaka

doi:10.1088/1361-6439/abb753

Fabrication method of quartz glass ring resonator using sacrificial support structure

Muhammad Jehanzeb Khan, Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.

Original language	English
Article number	115018
Journal	Journal of Micromechanics and Microengineering
Volume	30
Issue number	11
DOIs	https://doi.org/10.1088/1361-6439/abb753
Publication status	Published - 2020 Nov

Keywords

MEMS gyroscope
quartz glass resonator
ring resonator
sacrificial supporting structure

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/1361-6439/abb753

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title = "Fabrication method of quartz glass ring resonator using sacrificial support structure",

abstract = "In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.",

keywords = "MEMS gyroscope, quartz glass resonator, ring resonator, sacrificial supporting structure",

author = "{Jehanzeb Khan}, Muhammad and Takashiro Tsukamoto and Shuji Tanaka",

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AU - Tsukamoto, Takashiro

AU - Tanaka, Shuji

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N2 - In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.

AB - In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.

KW - MEMS gyroscope

KW - quartz glass resonator

KW - ring resonator

KW - sacrificial supporting structure

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JF - Journal of Micromechanics and Microengineering

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ER -

Fabrication method of quartz glass ring resonator using sacrificial support structure

Abstract

Keywords

ASJC Scopus subject areas

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