Fabrication method of micromachined quartz glass resonator using sacrificial supporting structures

Muhammad Jehanzeb Khan, Takashiro Tsukamoto, Muhammad Salman Al Farisi, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Fabrication method of micromachined quartz glass resonator using sacrificial supporting structures'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds