Fabrication and properties of microcapacitors with a one-nanometer-thick single Ti0.87O2 nanosheet

Daisuke Ogawa, Kosho Akatsuka, Tomoteru Fukumura, Minoru Osada, Takayoshi Sasaki, Tetsuya Hasegawa

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

The dielectric and insulating properties of a single Ti 0.87O2 nanosheet were investigated by fabricating an Au/single Ti0.87O2 nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV cm-1.

Original languageEnglish
Pages (from-to)307-309
Number of pages3
JournalChemistry Letters
Volume43
Issue number3
DOIs
Publication statusPublished - 2014 Mar 11
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)

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