TY - GEN
T1 - Fabrication and optical properties of Pb(Mg1/3Nb 2/3)O3-PbTiO3 thin films on Si substrates by PLD method
AU - Shinozaki, Kazuo
AU - Hayashi, Shogo
AU - Wakiya, Naoki
AU - Kiguchi, Takanori
AU - Tanaka, Junzo
AU - Ishizawa, Nobuo
AU - Sato, Keisuke
AU - Kondo, Masao
AU - Kurihara, Kazuaki
PY - 2007/12/1
Y1 - 2007/12/1
N2 - Epitaxial 0.67Pb(Mg1/3Nb2/3)O3-0. 33PbTiO3 (PMN-PT) thin films with electro-optic effects were fabricated on (La0.5Sr0.5)Co03(LSCO)/CeO 2/YSZ-bufferd Si(001) substrates by double-pulse excitation PLD method with a mask mechanism. Epitaxial growths of PMN-PT thin films were successively grown by the two step growth method of PMN-PT film. The PMN-PT seed layer was deposited on the LSCO layer at 500°C which was the same temperature of the LSCO deposition. PMN-PT thin films was deposited on PMN-PT seed layer at 600°C which enable to grow high crystalinity PMN-PT film with smooth surfaces. We obtained the optimum fabrication condition of PMN-PT film with μm order thickness. Obtained film showed high crystallinity with FWHM = 0.73 degree of 1.6μm thickness. Electro-optic property and refractive index measured by prism coupling method were 2.59 at the wavelength of 633 run. The electro-optic coefficient r13 and r33 was measured by applying the electrical field between semi-transparent thin top electrode of Pt and bottom LSCO electrode. Electro-optic coefficient was r13=17pm/V at TE mode and r33=55pm/V at TM mode.
AB - Epitaxial 0.67Pb(Mg1/3Nb2/3)O3-0. 33PbTiO3 (PMN-PT) thin films with electro-optic effects were fabricated on (La0.5Sr0.5)Co03(LSCO)/CeO 2/YSZ-bufferd Si(001) substrates by double-pulse excitation PLD method with a mask mechanism. Epitaxial growths of PMN-PT thin films were successively grown by the two step growth method of PMN-PT film. The PMN-PT seed layer was deposited on the LSCO layer at 500°C which was the same temperature of the LSCO deposition. PMN-PT thin films was deposited on PMN-PT seed layer at 600°C which enable to grow high crystalinity PMN-PT film with smooth surfaces. We obtained the optimum fabrication condition of PMN-PT film with μm order thickness. Obtained film showed high crystallinity with FWHM = 0.73 degree of 1.6μm thickness. Electro-optic property and refractive index measured by prism coupling method were 2.59 at the wavelength of 633 run. The electro-optic coefficient r13 and r33 was measured by applying the electrical field between semi-transparent thin top electrode of Pt and bottom LSCO electrode. Electro-optic coefficient was r13=17pm/V at TE mode and r33=55pm/V at TM mode.
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U2 - 10.1109/ISAF.2007.4393425
DO - 10.1109/ISAF.2007.4393425
M3 - Conference contribution
AN - SCOPUS:51349142741
SN - 1424413338
SN - 9781424413331
T3 - IEEE International Symposium on Applications of Ferroelectrics
SP - 851
EP - 854
BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Y2 - 27 May 2007 through 31 May 2007
ER -