Fabrication and optical properties of Pb(Mg1/3Nb 2/3)O3-PbTiO3 thin films on Si substrates by PLD method

Kazuo Shinozaki, Shogo Hayashi, Naoki Wakiya, Takanori Kiguchi, Junzo Tanaka, Nobuo Ishizawa, Keisuke Sato, Masao Kondo, Kazuaki Kurihara

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Epitaxial 0.67Pb(Mg1/3Nb2/3)O3-0. 33PbTiO3 (PMN-PT) thin films with electro-optic effects were fabricated on (La0.5Sr0.5)Co03(LSCO)/CeO 2/YSZ-bufferd Si(001) substrates by double-pulse excitation PLD method with a mask mechanism. Epitaxial growths of PMN-PT thin films were successively grown by the two step growth method of PMN-PT film. The PMN-PT seed layer was deposited on the LSCO layer at 500°C which was the same temperature of the LSCO deposition. PMN-PT thin films was deposited on PMN-PT seed layer at 600°C which enable to grow high crystalinity PMN-PT film with smooth surfaces. We obtained the optimum fabrication condition of PMN-PT film with μm order thickness. Obtained film showed high crystallinity with FWHM = 0.73 degree of 1.6μm thickness. Electro-optic property and refractive index measured by prism coupling method were 2.59 at the wavelength of 633 run. The electro-optic coefficient r13 and r33 was measured by applying the electrical field between semi-transparent thin top electrode of Pt and bottom LSCO electrode. Electro-optic coefficient was r13=17pm/V at TE mode and r33=55pm/V at TM mode.

Original languageEnglish
Title of host publication2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages851-854
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Externally publishedYes
Event2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan
Duration: 2007 May 272007 May 31

Publication series

NameIEEE International Symposium on Applications of Ferroelectrics

Other

Other2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
CountryJapan
CityNara-city
Period07/5/2707/5/31

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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